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We report the first experimental demonstration of a vertical superjunction device in GaN. P-type nickel oxide (NiO) is sputtered conformally in 6μm deep n-GaN trenches. Sputter recipe is tuned to enable 1017 cm −3 level acceptor concentration in NiO, easing its charge balance with the 9×1016 cm −3 doped n-GaN. Vertical GaN superjunction p-n diodes (SJ-PNDs) are fabricated on both native GaN and low-cost sapphire substrates. GaN SJ-PNDs on GaN and sapphire both show a breakdown voltage (BV) of 1100 V, being at least 900 V higher than their 1-D PND counterparts. The differential specific on-resistance (RON,SP) of the two SJ-PNDs are both 0.3mΩ⋅ cm 2 , with the drift region resistance (RDR,SP) extracted to be 0.15mΩ⋅ cm 2 . The RON,SP∼BV trade-off is among the best in GaN-on-GaN diodes and sets a new record for vertical GaN devices on foreign substrates. The RDR,SP∼BV trade-off exceeds the 1-D GaN limit, fulfilling the superjunction functionality in GaN.more » « less
null (Ed.)Creating seamless heterostructures that exhibit the quantum Hall effect and superconductivity is highly desirable for future electronics based on topological quantum computing. However, the two topologically robust electronic phases are typically incompatible owing to conflicting magnetic field requirements. Combined advances in the epitaxial growth of a nitride superconductor with a high critical temperature and a subsequent nitride semiconductor heterostructure of metal polarity enable the observation of clean integer quantum Hall effect in the polarization-induced two-dimensional (2D) electron gas of the high-electron mobility transistor. Through individual magnetotransport measurements of the spatially separated GaN 2D electron gas and superconducting NbN layers, we find a small window of magnetic fields and temperatures in which the epitaxial layers retain their respective quantum Hall and superconducting properties. Its analysis indicates that in epitaxial nitride superconductor/semiconductor heterostructures, this window can be significantly expanded, creating an industrially viable platform for robust quantum devices that exploit topologically protected transport.more » « less