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Title: First Demonstration of Vertical Superjunction Diode in GaN
We report the first experimental demonstration of a vertical superjunction device in GaN. P-type nickel oxide (NiO) is sputtered conformally in 6μm deep n-GaN trenches. Sputter recipe is tuned to enable 1017 cm −3 level acceptor concentration in NiO, easing its charge balance with the 9×1016 cm −3 doped n-GaN. Vertical GaN superjunction p-n diodes (SJ-PNDs) are fabricated on both native GaN and low-cost sapphire substrates. GaN SJ-PNDs on GaN and sapphire both show a breakdown voltage (BV) of 1100 V, being at least 900 V higher than their 1-D PND counterparts. The differential specific on-resistance (RON,SP) of the two SJ-PNDs are both 0.3mΩ⋅ cm 2 , with the drift region resistance (RDR,SP) extracted to be 0.15mΩ⋅ cm 2 . The RON,SP∼BV trade-off is among the best in GaN-on-GaN diodes and sets a new record for vertical GaN devices on foreign substrates. The RDR,SP∼BV trade-off exceeds the 1-D GaN limit, fulfilling the superjunction functionality in GaN.  more » « less
Award ID(s):
2036740 2036915
PAR ID:
10396736
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
First Demonstration of Vertical Superjunction Diode in GaN
Page Range / eLocation ID:
35.6.1 to 35.6.4
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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