Search for: All records

Highly doped n-Al_0.6Ga_0.4N can be used to form tunnel junctions (TJs) on deep ultraviolet (UVC) LEDs and markedly increase the light extraction efficiency (LEE) compared to the use of p-GaN/p-AlGaN. High quality Al_0.6Ga_0.4N was grown by NH₃-assisted molecular beam epitaxy (NH₃MBE) on top of AlN on SiC substrate. The films were crack free under scanning electron microscope (SEM) for the thickness investigated (up to 1 µm). X-ray diffraction reciprocal space map scan was used to determine the Al composition and the result is in close agreement with atom probe tomography (APT) measurements. By varying the growth parameters including growth rate, and Si cell temperature, n-Al_0.6Ga_0.4N with an electron density of 4×10¹⁹/cm³and a resistivity of 3 mΩ·cm was achieved. SIMS measurement shows that a high Si doping level up to 2×10²⁰/cm³can be realized using a Si cell temperature of 1450 °C and a growth rate of 210 nm/hr. Using a vanadium-based annealed contact, ohmic contact with a specific resistance of 10⁻⁶Ω·cm²was achieved as determined by circular transmission line measurement (CTLM). Finally, the n-type AlGaN regrowth was done on MOCVD grown UVC LEDs to form UVC TJ LED. The sample was processed into thin film flip chip (TFFC) configuration. The emission wavelength is around 278 nm and the excess voltage of processed UV LED is around 4.1 V.