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Membrane-based acoustic metamaterials have been reported to achieve 100% absorption, the acoustic analogue of photonic black-hole. However, the bandwidth is usually very narrow around some local resonance frequency, which limits its practical use. To address this limitation and achieve a broadband absorption, this paper first establishes a theoretical framework for unit cells of air-backed diaphragms, modeled as an equivalent mass-spring-dashpot system. Based on the impedance match principle, three different approaches are numerically investigated by tuning the cavity length, the static pressure in the cavity, and the effective damping of perforated plates. A prototype with polyimide diaphragm and 3D printed substrate is then fabricated and characterized using an acoustic impedance tube. Preliminary experiments show the feasibility to achieve an absorption bandwidth of ∼200 Hz at center frequency of 1.45 kHz. This work pays the way for developing a sub-wavelength light weight broadband acoustic absorber for a variety of applications in noise control. 

An air-backed diaphragm is the key structure of most dynamic pressure sensors and plays a critical role in determining the sensor performance. Our previous analytical model investigated the influence of air cavity length on the sensitivity and bandwidth. The model found that as the cavity length decreases, the static sensitivity monotonically decreases, and the fundamental natural frequency shows a three-stage trend: increasing in the long-cavity-length range, reaching a plateau value in the medium-cavity-length range, and decreasing in the short-cavity-length range, which cannot be captured by the widely used lumped model. In this study, we conducted the first experimental measurements to validate these findings. Pressure sensors with a circular polyimide diaphragm and a backing air cavity with an adjustable length were designed, fabricated, and characterized, from which the static sensitivities and fundamental natural frequencies were obtained as a function of the cavity length. A further parametric study was conducted by changing the in-plane tension in the diaphragm. A finite element model was developed in COMSOL to investigate the effects of thermoviscous damping and provide validation for the experimental study. Along with the analytical model, this study provides a new understanding and important design guidelines for dynamic pressure sensors with air-backed diaphragms.