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Method for the experimental measurement of bulk and shear loss angles in amorphous thin films

https://doi.org/10.1103/PhysRevD.101.042004

Vajente, Gabriele ; Fazio, Mariana ; Yang, Le ; Gupta, Anchal ; Ananyeva, Alena ; Billinsley, Garilynn ; Menoni, Carmen S. ( February 2020 , Physical Review D)

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Modifications of ion beam sputtered tantala thin films by secondary argon and oxygen bombardment

https://doi.org/10.1364/AO.59.00A150

Yang, Le ; Randel, Emmett ; Vajente, Gabriele ; Ananyeva, Alena ; Gustafson, Eric ; Markosyan, Ashot ; Bassiri, Riccardo ; Fejer, Martin ; Menoni, Carmen ( January 2020 , Applied Optics)

Amorphous tantala ( ${T a}_{2} O_{5}$ ) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist ${A r}^{+}$ or ${A r}^{+} / O_{2}^{+}$ bombardment. Under the conditions of the experiment, the as-deposited thin films are amorphous and stoichiometric. The refractive index and optical band gap of thin films remain unchanged by ion bombardment. Around 20% improvement in room temperature mechanical loss and 60% decrease in absorption loss are found in samples bombarded with 100-eV ${A r}^{+}$ . A detrimental influence from low energy $O_{2}^{+}$ bombardment on absorption loss and mechanical loss is observed. Low energy ${A r}^{+}$ bombardment removes excess oxygen point defects, while $O_{2}^{+}$ bombardment introduces defects into the tantala films.

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Investigation of effects of assisted ion bombardment on mechanical loss of sputtered tantala thin films for gravitational wave interferometers

https://doi.org/10.1103/PhysRevD.100.122004

Yang, Le ; Randel, Emmett ; Vajente, Gabriele ; Ananyeva, Alena ; Gustafson, Eric ; Markosyan, Ashot ; Bassiri, Riccardo ; Fejer, Martin M. ; Menoni, Carmen S. ( December 2019 , Physical Review D)

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