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Abstract With advances in nanofabrication techniques, extreme-scale nanophotonic devices with critical gap dimensions of just 1–2 nm have been realized. Plasmons in such ultranarrow gaps can exhibit nonlocal response, which was previously shown to limit the field enhancement and cause optical properties to deviate from the local description. Using atomic layer lithography, we create mid-infrared-resonant coaxial apertures with gap sizes as small as 1 nm and observe strong evidence of nonlocality, including spectral shifts and boosted transmittance of the cutoff epsilon-near-zero mode. Experiments are supported by full-wave 3-D nonlocal simulations performed with the hybridizable discontinuous Galerkin method. This numerical method captures atomic-scale variations of the electromagnetic fields while efficiently handling extreme-scale size mismatch. Combining atomic-layer-based fabrication techniques with fast and accurate numerical simulations provides practical routes to design and fabricate highly-efficient large-area mid-infrared sensors, antennas, and metasurfaces. 

Advances in mid-IR lasers, detectors, and nanofabrication technology have enabled new device architectures to implement on-chip sensing applications. In particular, direct integration of plasmonic resonators with a dielectric waveguide can generate an ultra-compact device architecture for biochemical sensing via surface-enhanced infrared absorption (SEIRA) spectroscopy. A theoretical investigation of such a hybrid architecture is imperative for its optimization. In this work, we investigate the coupling mechanism between a plasmonic resonator array and a waveguide using temporal coupled-mode theory and numerical simulation. The results conclude that the waveguide transmission extinction ratio reaches maxima when the resonator-waveguide coupling rate is maximal. Moreover, after introducing a model analyte in the form of an oscillator coupled with the plasmonics-waveguide system, the transmission curve with analyte absorption can be fitted successfully. We conclude that the extracted sensing signal can be maximized when analyte absorption frequency is the same as the transmission minima, which is different from the plasmonic resonance frequency. This conclusion is in contrast to the dielectric resonator scenario and provides an important guideline for design optimization and sensitivity improvement of future devices.