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  1. Abstract

    Bound states in the continuum (BIC) is an exotic concept describing systems without radiative loss. BICs are widely investigated in optics due to numerous potential applications including lasing, sensing, and filtering, among others. This study introduces a structurally tunable BIC terahertz metamaterial fabricated using micromachining and experimentally characterized using terahertz time domain spectroscopy. Control of the bending angle of the metamaterial by thermal actuation modifies the capacitance enabling tuning from a quasi‐BIC state with a quality factor of 26 to the BIC state. The dynamic response from the quasi‐BIC state to the BIC state is achieved by blueshifting the resonant frequency of the LC mode while maintaining a constant resonant frequency for the dipole mode. Additional insight into the tunable electromagnetic response is obtained using temporal coupled mode theory (CMT). The results reveal the effectiveness of bi‐layer cantilever‐based structures to realize tunable BIC metamaterials with potential applications for nonlinear optics and light‐matter control at terahertz frequencies.

     
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  2. Abstract

    Compared with the traditional electric and magnetic multipoles, the existence of a dynamic toroidal moment has received increasing interest in recent years. This is due to its novel electromagnetic response, including dynamic non‐radiating charge‐current configurations and non‐reciprocal interactions. Reconfigurable terahertz metamaterials where artificial toroidal metamolecules and traditional microelectromechanical systems bi‐material cantilever structures are integrated within the same unit cell are presented. Through modification of the bending angle by thermal actuation, the toroidal dipole intensity increases by five orders of magnitude in the out‐of‐plane direction with an overall increase in the toroidal intensity of nearly an order of magnitude. Terahertz time‐domain spectroscopy is used to determine the evolution of the transmission as a function of the bending angle. This enables numerical confirmation of the toroidal response using multipole decomposition with additional confirmation provided by phase analysis. The results demonstrate the use of bi‐material cantilevers to realize a tunable toroidal moment with potential applications in sensing and next‐generation communication technologies.

     
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  3. Abstract

    Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

     
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  4. Abstract

    Devices designed to dynamically control the transmission, reflection, and absorption of terahertz (THz) radiation are essential for the development of a broad range of THz technologies. A viable approach utilizes materials which undergo an insulator‐to‐metal transition (IMT), switching from transmissive to reflective upon becoming metallic. However, for many applications, it is undesirable to have spurious reflections that can scatter incident light and induce noise to the system. We present an electrically actuated, broadband THz switch which transitions from a transparent state with low reflectivity, to an absorptive state for which both the reflectivity and transmission are strongly suppressed. Our device consists of a patterned high‐resistivity silicon metamaterial layer that provides broadband reflection suppression by matching the impedance of free space. This is integrated with a VO2ground plane, which undergoes an IMT by means of a DC bias applied to an interdigitated electrode. THz time domain spectroscopy measurements reveal an active bandwidth of 700 GHz with suppressed reflection and more than 90% transmission amplitude modulation with a low insertion loss. We utilize finite‐difference time domain (FDTD) simulations in order to examine the loss mechanisms of the device, as well as the sensitivity to polarization and incident angle. This device validates a general approach toward suppressing unwanted reflections in THz modulators and switches which can be easily adapted to a broad array of applications through straightforward modifications of the structural parameters.

     
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  5. Abstract

    Terahertz spectroscopy of thec‐axis Josephson plasma resonance (JPR) in high‐temperature cuprates is a powerful probe of superconductivity, providing a route to couple to and interact with the condensate. Electromagnetic coupling between metasurface arrays of split ring resonators (SRRs) and the JPR of a La2−xSrxCuO4single crystal (Tc= 32 K) is investigated. The metasurface resonance frequency (ωMM), determined by the SRR geometry, is swept through the JPR frequency (ωJPR= 1.53 THz) using a series of interchangeable tapes applied to the same single crystal. Terahertz reflectivity measurements on the resulting hybrid superconducting metamaterials (HSMMs) reveal anticrossing behavior characteristic of strong coupling. The experimental results, validated with numerical simulations, indicate a normalized Rabi frequency of ΩR= 0.29. Further, it is shown that HSMMs with ωMM> ωJPRprovide a route to couple to hyperbolic waveguide modes inc‐axis cuprate samples. This work informs future possibilities for optimizing the coupling strength of HSMMs and investigating nonlinear superconductivity under high field terahertz excitation.

     
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  6. During the past decade, metasurfaces have shown great potential to complement standard optics, providing novel pathways to control the phase, amplitude, and polarization of electromagnetic waves utilizing arrays of subwavelength resonators. We present dynamic surface wave (SW) switching at terahertz frequencies utilizing a mechanically reconfigurable metasurface. Our metasurface is based on a microelectromechanical system (MEMS) consisting of an array of micro-cantilever structures, enabling dynamic tuning between a plane wave (PW) and a SW for normal incidence terahertz radiation. This is realized using line-by-line voltage control of the cantilever displacements to achieve full-span (2π<#comment/>) phase control. Full-wave electromagnetic simulations and terahertz time-domain spectroscopy agree with coupled mode theory, which was employed to design the metasurface device. A conversion efficiency of nearly 60% has been achieved upon switching between the PW and SW configurations. Moreover, a nearly 100 GHz working bandwidth is demonstrated. The MEMS-based control modality we demonstrate can be used for numerous applications, including but not limited to terahertz multifunctional metasurface devices for spatial light modulation, dynamic beam steering, focusing, and beam combining, which are crucial for future “beyond 5G” communication systems.

     
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  7. null (Ed.)
    Metamaterials represent a class of artificially engineered materials, which exhibit unprecedented properties enabled by their constituent subwavelength unit cells. The effective properties of metamaterials may be dynamically controlled by driving unit cells via different approaches, including photo-doping, electrical gating, or mechanical actuation. With such dynamical tuning mechanisms, the propagation modality of electromagnetic waves may be modulated to achieve functional devices for modulation, beam steering, focusing, and polarization control, among others. In addition, the perfect absorption and near field effect enabled by metamaterials may be used in electromagnetic detectors across the frequency spectrum. Microsystem technology provides a platform to achieve functional metamaterial devices by covering all requisite processes, including fabrication, packaging, and system integration. We report our progress in constructing functional devices by integrating metamaterials with microsystems technology and discuss remaining challenges and the future direction of metamaterial devices. 
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  8. The concept of “bound states in the continuum” (BIC) describes an idealized physical system exhibiting zero radiative loss composed, for example, of an infinitely extended array of resonators. In principle, vanishing of radiative losses enables an infinitely high-quality factor and corresponding infinite lifetime of the resonance. As such, BIC inspired metasurfaces and photonic designs aim to achieve superior performance in various applications including sensing and lasing. We describe an analytical model based on temporal coupled mode theory to realize an “accidental” (i.e., parameter-tuned) Friedrich–Wintgen BIC. Further, we experimentally verify this model with measurements of quasi-BICs in a metallic terahertz metasurface (MS) and the corresponding complementary metasurface (CMS) using terahertz time domain spectroscopy. For the MS and CMS structures, quality factors of∼<#comment/>20are achieved, limited by non-radiative intrinsic loss in the materials. Our results reveal that Babinet’s principle qualitatively holds for the MS and CMS quasi-BIC structures. In addition, ultra-high electric and magnetic field enhancement MS and CMS structures, respectively, are presented.

     
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