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Title: Functional Metamaterial Devices Enabled by Microsystems
Metamaterials represent a class of artificially engineered materials, which exhibit unprecedented properties enabled by their constituent subwavelength unit cells. The effective properties of metamaterials may be dynamically controlled by driving unit cells via different approaches, including photo-doping, electrical gating, or mechanical actuation. With such dynamical tuning mechanisms, the propagation modality of electromagnetic waves may be modulated to achieve functional devices for modulation, beam steering, focusing, and polarization control, among others. In addition, the perfect absorption and near field effect enabled by metamaterials may be used in electromagnetic detectors across the frequency spectrum. Microsystem technology provides a platform to achieve functional metamaterial devices by covering all requisite processes, including fabrication, packaging, and system integration. We report our progress in constructing functional devices by integrating metamaterials with microsystems technology and discuss remaining challenges and the future direction of metamaterial devices.  more » « less
Award ID(s):
1810252
PAR ID:
10292015
Author(s) / Creator(s):
;
Date Published:
Journal Name:
2020 IEEE International Electron Devices Meeting (IEDM)
Page Range / eLocation ID:
26.2.1 to 26.2.4
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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