Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.
- Award ID(s):
- 1810252
- NSF-PAR ID:
- 10292015
- Date Published:
- Journal Name:
- 2020 IEEE International Electron Devices Meeting (IEDM)
- Page Range / eLocation ID:
- 26.2.1 to 26.2.4
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Abstract 2D metamaterials have immense potential in acoustics, optics, and electromagnetic applications due to their unique properties and ability to conform to curved substrates. Active metamaterials have attracted significant research attention because of their on‐demand tunable properties and performances through shape reconfigurations. 2D active metamaterials often achieve active properties through internal structural deformations, which lead to changes in overall dimensions. This demands corresponding alterations of the conforming substrate, or the metamaterial fails to provide complete area coverage, which can be a significant limitation for their practical applications. To date, achieving area‐preserving active 2D metamaterials with distinct shape reconfigurations remains a prominent challenge. In this paper, magneto‐mechanical bilayer metamaterials are presented that demonstrate area density tunability with area‐preserving capability. The bilayer metamaterials consist of two arrays of magnetic soft materials with distinct magnetization distributions. Under a magnetic field, each layer behaves differently, which allows the metamaterial to reconfigure its shape into multiple modes and to significantly tune its area density without changing its overall dimensions. The area‐preserving multimodal shape reconfigurations are further exploited as active acoustic wave regulators to tune bandgaps and wave propagations. The bilayer approach thus provides a new concept for the design of area‐preserving active metamaterials for broader applications.
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1109/IEDM13553.2020.9371924
