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We discuss the design of quantum hybrid inertial sensor that combines an optomechanical inertial sensor with the retroreflector of a cold atom interferometer. This sensor fusion approach provides absolute and high-accuracy measurements with cold atom interferometers, while utilizing the optomechanical inertial sensor at frequencies above the repetition rate of the atom interferometer. This improves the overall measurement bandwidth as well as the robustness and field deployment capabilities of these systems. We evaluate which parameters yield an optimal acceleration sensitivity, from which we anticipate a noise floor at nano-$g$levels from DC to 1 kHz.

We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of$1\times <\#comment/>{10}^{-<\#comment/>11}\mathrm{m}/{\mathrm{s}}^2\sqrt{\mathrm{H}\mathrm{z}}$. Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating$\mathit{\text{mQ}}$-products at levels of 250 kg, which highlight their exquisite acceleration sensitivity.

We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance.