We present a compact heterodyne laser interferometer developed for highsensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasimonolithic unit to realize a miniaturized system. The interferometer design adopts a commonmode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of
We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for lowfrequency gravitysensitive inertial sensors show attainable acceleration noise floors on the order of
 Publication Date:
 NSFPAR ID:
 10165375
 Journal Name:
 Applied Optics
 Volume:
 59
 Issue:
 22
 Page Range or eLocationID:
 Article No. G167
 ISSN:
 1559128X; APOPAI
 Publisher:
 Optical Society of America
 Sponsoring Org:
 National Science Foundation
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