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Title: Optomechanical inertial sensors
We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of 1 ×<#comment/> 10 −<#comment/> 11 m / s 2 H z . Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating mQ -products at levels of 250 kg, which highlight their exquisite acceleration sensitivity.  more » « less
Award ID(s):
1912106 1945832
PAR ID:
10165375
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Applied Optics
Volume:
59
Issue:
22
ISSN:
1559-128X; APOPAI
Format(s):
Medium: X Size: Article No. G167
Size(s):
Article No. G167
Sponsoring Org:
National Science Foundation
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