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Title: Optomechanical inertial sensors

We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of1×<#comment/>10−<#comment/>11m/s2Hz. Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstratingmQ-products at levels of 250 kg, which highlight their exquisite acceleration sensitivity.

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Award ID(s):
1912106 1945832
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Applied Optics
1559-128X; APOPAI
Page Range / eLocation ID:
Article No. G167
Medium: X
Sponsoring Org:
National Science Foundation
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