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Micro Projection-based Stereolithography (µPSL), also known as micro vat photopolymerization, is a promising technology that could revolutionize microfabrication by providing benefits similar to traditional lithography while reducing production time and cost. However, it faces a significant challenge in the form of the "proximity effect." This effect occurs when adjacent features are too close together, causing undesirable artifacts and limiting the achievable fabrication resolution. The proximity effect is caused by interactions between adjacent pixels of light and affects both the spatial and temporal domains of the fabrication process. Although researchers have been aware of this issue for some time, there has been little progress in understanding and addressing the proximity effect in micro vat photopolymerization. Existing models developed for laser-based systems can explain the effect to some extent, but they do not fully account for the impact of large area projection or explain how local threshold changes affect part size. This research aims to fill this knowledge gap by using in-situ observation systems to experimentally study the spatial and temporal proximity effects in single-shot vat photopolymerization microfabrication. We also investigate the role of oxygen in the proximity effect and lay the groundwork for better understanding how the effect impacts periodic structures with micronic inter-feature distances. In conclusion, while micro vat photopolymerization offers significant advantages over traditional lithography, the proximity effect remains a significant obstacle. This research represents an important step forward in addressing this challenge and improving the accuracy and resolution of vat photopolymerization in microfabrication. 

Abstract Digital maskless lithography is gaining popularity due to its unique ability to quickly fabricate high-resolution parts without the use of physical masks. By implementing controlled grayscaling and exposure control, it has the potential to replace conventional lithography altogether. However, despite the existence of a theoretical foundation for photopolymerization, observing the voxel growth process in situ is a significant challenge. This difficulty can be attributed to several factors, including the microscopic size of the parts, the low refractive index difference between cured and uncured resin, and the rapid rate of photopolymerization once it crosses a certain threshold. As such, there is a pressing need for a system that can address these issues. To tackle these challenges, the paper proposes a modified Schlieren-based observation system that utilizes confocal magnifying optics to create a virtual screen at the camera's focal plane. This system allows for the visualization of the minute changes in refractive indices made visible by the use of Schlieren optics, specifically the deflection of light by the changing density-induced refractive index gradient. The use of focusing optics provides the system with the flexibility needed to position the virtual screen and implement optical magnification. The researchers employed single-shot binary images with different pixel numbers to fabricate voxels and examine the various factors affecting voxel shape, including chemical composition and energy input. The observed results were then compared against simulations based on Beer–Lambert's law, photopolymerization curve, and Gaussian beam propagation theory. The physical experimental results validated the effectiveness of the proposed observation system. The paper also briefly discusses the application of this system in fabricating microlenses and its advantages over theoretical model-based profile predictions. 

Structural color utilizing microscale concave interfaces has been reported in several publications, but the explanation is currently incomplete. Within this work, the physics behind this coloration technique is clarified using multiple light sources and simulations.