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Fluorescence collection from individual emitters plays a key role in state detection and remote entanglement generation, fundamental functionalities in many quantum platforms. Planar photonics have been demonstrated for robust and scalable addressing of trapped-ion systems, motivating consideration of similar elements for the complementary challenge of photon collection. Here, using an argument from the reciprocity principle, we show that far-field photon collection efficiency can be simply expressed in terms of the fields associated with the collection optic at the emitter position alone. We calculate collection efficiencies into ideal paraxial and fully vectorial focused Gaussian modes parameterized in terms of focal waist, and further quantify the modest enhancements possible with more general beam profiles, establishing design requirements for efficient collection. Toward practical implementation, we design, fabricate, and characterize two diffractive collection elements operating atλ = 397 nm; a forward emitting design is predicted to offer 0.25% collection efficiency into a single waveguide mode, while a more efficient reverse-emitting design offers 1.14% collection efficiency, albeit with more demanding fabrication requirements. Close agreement between simulated and measured emission for both designs indicates practicality of these collection efficiencies, and we indicate avenues to improved devices approaching the limits predicted for ideal beams. We point out a particularly simple integrated waveguide configuration for polarization-based remote entanglement generation enabled by integrated collection. 

Ultraviolet and visible integrated photonics enable applications in quantum information, sensing, and spectroscopy, among others. Few materials support low-loss photonics into the UV, and the relatively low refractive index of known depositable materials limits the achievable functionality. Here, we present a high-index integrated photonics platform based on HfO₂and Al₂O₃composites deposited via atomic layer deposition (ALD) with low loss in the visible and near UV. We show that Al₂O₃incorporation dramatically decreases bulk loss compared to pure HfO₂, consistent with inhibited crystallization due to the admixture of Al₂O₃. Composites exhibit refractive indexnfollowing the average of that of HfO₂and Al₂O₃, weighted by the HfO₂fractional compositionx. Atλ = 375 nm, composites withx = 0.67 exhibitn = 2.01, preserving most of HfO₂’s significantly higher index, and 3.8(7) dB/cm material loss. We further present fully etched and cladded waveguides, grating couplers, and ring resonators, realizing a single-mode waveguide loss of 0.25(2) dB/cm inferred from resonators of 2.6 million intrinsic quality factor atλ = 729 nm, 2.6(2) dB/cm atλ = 405 nm, and 7.7(6) dB/cm atλ = 375 nm. We measure the composite’s thermo-optic coefficient (TOC) to be 2.44(3) × 10⁻⁵RIU/°C nearλ = 397 nm. This work establishes (HfO₂)_x(Al₂O₃)_1−xcomposites as a platform amenable to integration for low-loss, high-index photonics spanning the UV to NIR.