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1. Lab-on-a-chip optical biosensor platform: a micro-ring resonator integrated with a near-infrared Fourier transform spectrometer

   https://doi.org/10.1364/OL.492172  

   Yoo, Kyoung_Min; Fan, Kang-Chieh; Hlaing, May; Jain, Sourabh; Ning, Shupeng; An, Yue; Chen, Ray_T (October 2023, Optics Letters)

   In this paper, we demonstrated the design and experimental results of the near-infrared lab-on-a-chip optical biosensor platform that monolithically integrates the MRR and the on-chip spectrometer on the silicon-on-insulator (SOI) wafer, which can eliminate the external optical spectrum analyzer for scanning the wavelength spectrum. The symmetric add-drop MRR biosensor is designed to have a free spectral range (FSR) of ∼19 nm and a bulk sensitivity of ∼73 nm/RIU; then the drop-port output resonance peaks are reconstructed from the integrated spatial-heterodyne Fourier transform spectrometer (SHFTS) with the spectral resolution of ∼3.1 nm and the bandwidth of ∼50 nm, which results in the limit of detection of 0.042 RIU. 

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2. An optofluidic metasurface for lateral flow-through detection of cancer biomarker (Conference Presentation)

   https://doi.org/10.1117/12.2288438  

   Wang, Yifei; Ali, Md Azahar; Dong, Liang; Lu, Meng (March 2018, Proc. SPIE 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI, 1049113 (15 March 2018))

   The rapid growth of point-of-care tests demands for biomolecule sensors with higher sensitivity and smaller size. We developed an optofluidic metasurface that combined silicon photonics and nanofluidics to achieve a lateral flow-through biosensor to fulfill the needs. The metasurface consists of a 2D array of silicon nanoposts fabricated on a silicon-on-insulator substrate. The device takes advantage of the high-Q resonant modes associated with the optical bound state and the nanofluidic delivery of analyte to overcome the problem of diffusion-limited detection that occurs in almost all conventional biosensors and offer a high refractive index sensitivity. We used rigorous coupled wave analysis and finite element analysis to design and optimize the device. We will present its photonic band diagram to identify the optical bound state and high-Q resonance modes near 1550 nm. The device was fabricated using e-beam lithography followed by a lift-off and reactive ion etching process. Reflectance of the sensor was measured using a tunable laser and a photodetector. The preliminary result shows a refractive index sensitivity of 720 nm/RIU. Furthermore, we implemented the optical metasurface as a lateral flow-through biosensor by covering the nanoposts using a PDMS cover. The nanofluidic channels are formed between the nanoposts for the flow of samples. The lateral flow-through sensor was used to detect the epidermal growth factor receptor (ErbB2), a widely used protein biomarker for breast cancer screening. The results show that the device can quantitatively measure the binding of ErBb2 antibody and ErBb2 by the continuous monitoring of the resonant wavelength shift. 

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3. Near-Infrared Lab-on-a-Chip Optical Biosensor with Micro Ring Resonator and Fourier Transform Spectrometer on SOI platform

   https://doi.org/10.1364/CLEO_SI.2023.SF2E.1  

   Yoo, Kyoung Min; Fan, Kang-Chieh; An, Yue; Hlaing, May; Jain, Sourabh; Chen, Ray T. (January 2023, CLEO 2023)

   We demonstrated the design and experimental results of the near-infrared lab-on-a-chip optical biosensor platform that monolithically integrates the micro-ring-resonator and the on-chip spectrometer on the SOI wafer with the limit of detection of 0.042 RIU. 

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4. A compact Michelson interferometer based on-chip Fourier transform spectrometer

   https://doi.org/10.1117/12.2663712  

   Donnelly, Daniel; Shen, Jianhao; Chakravarty, Swapnajit (June 2023, SPIE)

   Crocombe, Richard A.; Profeta, Luisa T. (Ed.)

   We experimentally demonstrate a compact Fourier Transform on-chip spectrometer based on spatially heterodyned array of Michelson interferometers (MIs) in a silicon-on-insulator (SOI) platform. We demonstrate that with the same progressive geometric path length difference between the spatially heterodyned arrayed interferometer arms, MIs double the optical phase delays and thus double the wavelength resolution (δλ=0.8nm) compared to Mach-Zehnder interferometers (MZIs) (δλ=1.6nm). Our proof-of-concept device demonstrates one method to address the bandwidth-resolution tradeoff inherent in on-chip FTIRs, which gains in significance for optical sensing applications requiring single digit picometers resolution in compact on-chip form factors 

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5. Fabrication of Localized Silicon-on-Insulator Based Rhombus-Shaped Channels in Silicon

   Ogini, Martins; Voyantzis, Mitchell; Koech, Philemon; Francis, Aneeta; Mohan, Susmitha; Deo, Makarand; Albin, Sacharia. (May 2019, ECS Meeting Abstracts)

   null (Ed.)

   Fabricating localized silicon-on-insulator (LSOI) on bulk silicon eliminates the need for using expensive SOI wafers for silicon waveguides and MEMS applications. One of the most important building blocks in silicon photonics is optical waveguide, which usually consists of silicon surrounded by silicon dioxide with refractive indices of 3.5 and 1.5, respectively. It was observed that the SOI wafer puts restrictions on the integration of electronics and photonics because the buried oxide is too thin for field confinement. Hence, fabrication of LSOI in standard silicon wafers is considered to have precise control of the oxide thickness which will lead to effective integration of electronic and photonic devices. We used rhombus-shaped channel method in the fabrication of LSOI structure that can be produced on any part of a bulk silicon wafer. 

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