Bending and folding techniques such as origami and kirigami enable the scale‐invariant design of 3D structures, metamaterials, and robots from 2D starting materials. These design principles are especially valuable for small systems because most micro‐ and nanofabrication involves lithographic patterning of planar materials. Ultrathin films of inorganic materials serve as an ideal substrate for the fabrication of flexible microsystems because they possess high intrinsic strength, are not susceptible to plasticity, and are easily integrated into microfabrication processes. Here, atomic layer deposition (ALD) is employed to synthesize films down to 2 nm thickness to create membranes, metamaterials, and machines with micrometer‐scale dimensions. Two materials are studied as model systems: ultrathin SiO2and Pt. In this thickness limit, ALD films of these materials behave elastically and can be fabricated with fJ‐scale bending stiffnesses. Further, ALD membranes are utilized to design micrometer‐scale mechanical metamaterials and magnetically actuated 3D devices. These results establish thin ALD films as a scalable basis for micrometer‐scale actuators and robotics.
Origami and kirigami, the ancient techniques for making paper works of art, also provide inspiration for routes to structural platforms in engineering applications, including foldable solar panels, retractable roofs, deployable sunshields, and many others. Recent work demonstrates the utility of the methods of origami/kirigami and conceptually related schemes in cutting, folding, and buckling in the construction of devices for emerging classes of technologies, with examples in mechanical/optical metamaterials, stretchable/conformable electronics, micro/nanoscale biosensors, and large‐amplitude actuators. Specific notable progress is in the deployment of functional materials such as single‐crystal silicon, shape memory polymers, energy‐storage materials, and graphene into elaborate 3D micro and nanoscale architectures. This review highlights some of the most important developments in this field, with a focus on routes to assembly that apply across a range of length scales and with advanced materials of relevance to practical applications.
more » « less- Award ID(s):
- 1635443
- NSF-PAR ID:
- 10063299
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials Interfaces
- Volume:
- 5
- Issue:
- 13
- ISSN:
- 2196-7350
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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