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  • Characterization of Elastic Modulus Across the (Al 1–x Sc x )N System Using DFT and Substrate-Effect-Corrected Nanoindentation
Title: Characterization of Elastic Modulus Across the (Al 1–x Sc x )N System Using DFT and Substrate-Effect-Corrected Nanoindentation
Award ID(s):
1534503
NSF-PAR ID:
10080202
Author(s) / Creator(s):
; ; ; ; ; ; ; ;
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume:
65
Issue:
11
ISSN:
0885-3010
Page Range / eLocation ID:
p. 2167-2175
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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