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Title: Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition
Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver( i ) and gold( i ) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal decomposition. These new volatile compounds provide metallic films of silver and gold during CVD with hydrogen below 230 °C.  more » « less
Award ID(s):
1764338
PAR ID:
10093719
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Dalton Transactions
ISSN:
1477-9226
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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