Force characterization and analysis of thin film actuators for untethered microdevices
- Award ID(s):
- 1635443
- NSF-PAR ID:
- 10094621
- Date Published:
- Journal Name:
- AIP Advances
- Volume:
- 9
- Issue:
- 5
- ISSN:
- 2158-3226
- Page Range / eLocation ID:
- 055011
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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