Force characterization and analysis of thin film actuators for untethered microdevices
- Award ID(s):
- 1635443
- Publication Date:
- NSF-PAR ID:
- 10094621
- Journal Name:
- AIP Advances
- Volume:
- 9
- Issue:
- 5
- Page Range or eLocation-ID:
- 055011
- ISSN:
- 2158-3226
- Sponsoring Org:
- National Science Foundation
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