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Title: Force characterization and analysis of thin film actuators for untethered microdevices
Authors:
; ; ; ; ; ;
Award ID(s):
1635443
Publication Date:
NSF-PAR ID:
10094621
Journal Name:
AIP Advances
Volume:
9
Issue:
5
Page Range or eLocation-ID:
055011
ISSN:
2158-3226
Sponsoring Org:
National Science Foundation
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