Modulation-based control and locking of lasers, filters and other photonic components is a ubiquitous function across many applications that span the visible to infrared (IR), including atomic, molecular and optical (AMO), quantum sciences, fiber communications, metrology, and microwave photonics. Today, modulators used to realize these control functions consist of high-power bulk-optic components for tuning, sideband modulation, and phase and frequency shifting, while providing low optical insertion loss and operation from DC to 10s of MHz. In order to reduce the size, weight and cost of these applications and improve their scalability and reliability, modulation control functions need to be implemented in a low loss, wafer-scale CMOS-compatible photonic integration platform. The silicon nitride integration platform has been successful at realizing extremely low waveguide losses across the visible to infrared and components including high performance lasers, filters, resonators, stabilization cavities, and optical frequency combs. Yet, progress towards implementing low loss, low power modulators in the silicon nitride platform, while maintaining wafer-scale process compatibility has been limited. Here we report a significant advance in integration of a piezo-electric (PZT, lead zirconate titanate) actuated micro-ring modulation in a fully-planar, wafer-scale silicon nitride platform, that maintains low optical loss (0.03 dB/cm in a 625 µm resonator) at 1550 nm, with an order of magnitude increase in bandwidth (DC - 15 MHz 3-dB and DC - 25 MHz 6-dB) and order of magnitude lower power consumption of 20 nW improvement over prior PZT modulators. The modulator provides a >14 dB extinction ratio (ER) and 7.1 million quality-factor (Q) over the entire 4 GHz tuning range, a tuning efficiency of 162 MHz/V, and delivers the linearity required for control applications with 65.1 dB·Hz2/3and 73.8 dB·Hz2/3third-order intermodulation distortion (IMD3) spurious free dynamic range (SFDR) at 1 MHz and 10 MHz respectively. We demonstrate two control applications, laser stabilization in a Pound-Drever Hall (PDH) lock loop, reducing laser frequency noise by 40 dB, and as a laser carrier tracking filter. This PZT modulator design can be extended to the visible in the ultra-low loss silicon nitride platform with minor waveguide design changes. This integration of PZT modulation in the ultra-low loss silicon nitride waveguide platform enables modulator control functions in a wide range of visible to IR applications such as atomic and molecular transition locking for cooling, trapping and probing, controllable optical frequency combs, low-power external cavity tunable lasers, quantum computers, sensors and communications, atomic clocks, and tunable ultra-low linewidth lasers and ultra-low phase noise microwave synthesizers.
A passive resonant sensor with kirigami patterning is presented to wirelessly report material deformation in closed systems. The sensors are fabricated from copper‐coated polyimide by etching a conductive Archimedean spiral and then laser cutting kirigami patterns. The sensor response is defined as the resonant frequency in the transmission scattering parameter signal (
- Award ID(s):
- 1827578
- NSF-PAR ID:
- 10461337
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials Technologies
- Volume:
- 4
- Issue:
- 5
- ISSN:
- 2365-709X
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
More Like this
-
more » « less
-
more » « less
Graphene nanocomposites are a promising class of advanced materials for sensing applications; yet, their commercialization is hindered due to impurity incorporation during fabrication and high costs. The aim of this work is to prepare graphene–polysulfone (G−PSU) and graphene–polyvinylidene fluoride (G−PVDF) nanocomposites that perform as multifunctional sensors and are formed using a one-step, in situ exfoliation process whereby graphite is exfoliated into graphene nanoflakes (GNFs) directly within the polymer. This low-cost method creates a nanocomposite while avoiding impurity exposure since the raw materials used in the in situ shear exfoliation process are graphite and polymers. The morphology, structure, thermal properties, and flexural properties were determined for G−PSU and G−PVDF nanocomposites, as well as the electromechanical sensor capability during cyclic flexural loading, temperature sensor testing while heating and cooling, and electrochemical sensor capability to detect dopamine while sensing data wirelessly. G−PSU and G−PVDF nanocomposites show superior mechanical characteristics (gauge factor around 27 and significantly enhanced modulus), thermal characteristics (stability up to 500 °C and 170 °C for G−PSU and G−PVDF, respectively), electrical characteristics (0.1 S/m and 1 S/m conductivity for G−PSU and G−PVDF, respectively), and distinguished resonant peaks for wireless sensing (~212 MHz and ~429 MHz). These uniquely formed G−PMC nanocomposites are promising candidates as strain sensors for structural health monitoring, as temperature sensors for use in automobiles and aerospace applications, and as electrochemical sensors for health care and disease diagnostics.
-
more » « less
The capability to modulate the intensity of an optical beam has scientific and practical significance. In this work, we demonstrate Y-Z cut lithium niobate acousto-optic modulators with record-high modulation efficiency, requiring only 1.5 W/cm2for 100% modulation at 7 MHz. These modulators use a simple fabrication process; coating the top and bottom surfaces of a thin lithium niobate wafer with transparent electrodes. The fundamental shear acoustic mode of the wafer is excited through the transparent electrodes by applying voltage with frequency corresponding to the resonant frequency of this mode, confining an acoustic standing wave to the electrode region. Polarization of light propagating through this region is modulated at the applied frequency. Polarization modulation is converted to intensity modulation by placing the modulator between polarizers. To showcase an important application space for this modulator, we integrate it with a standard image sensor and demonstrate 4 megapixel time-of-flight imaging.
-
more » « less
Abstract Frequency modulated continuous wave laser ranging (FMCW LiDAR) enables distance mapping with simultaneous position and velocity information, is immune to stray light, can achieve long range, operate in the eye-safe region of 1550 nm and achieve high sensitivity. Despite its advantages, it is compounded by the simultaneous requirement of both narrow linewidth low noise lasers that can be precisely chirped. While integrated silicon-based lasers, compatible with wafer scale manufacturing in large volumes at low cost, have experienced major advances and are now employed on a commercial scale in data centers, and impressive progress has led to integrated lasers with (ultra) narrow sub-100 Hz-level intrinsic linewidth based on optical feedback from photonic circuits, these lasers presently lack fast nonthermal tuning, i.e. frequency agility as required for coherent ranging. Here, we demonstrate a hybrid photonic integrated laser that exhibits very narrow intrinsic linewidth of 25 Hz while offering linear, hysteresis-free, and mode-hop-free-tuning beyond 1 GHz with up to megahertz actuation bandwidth constituting 1.6 × 1015Hz/s tuning speed. Our approach uses foundry-based technologies - ultralow-loss (1 dB/m) Si3N4photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase-noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise at mid-range offsets. By utilizing difference-drive and apodization of the photonic chip to suppress mechanical vibrations of the chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm. Our results constitute a photonic integrated laser system for scenarios where high compactness, fast frequency actuation, and high spectral purity are required.
-
more » « less
Abstract In this work, a scalable and rapid process is developed for creating a low‐cost humidity sensor for wireless monitoring of moisture levels within packaged goods. The sensor comprises a moisture‐sensitive interdigitated capacitor connected to a planar spiral coil, forming an LC circuit whose resonant frequency is a function of environmental humidity. The sensor is fabricated on a commercially available metallized parchment paper through selective laser ablation of the laminated aluminum (Al) film on the parchment paper substrate. The laser ablation process provides a unique one‐step patterning of the conductive Al layer on the paper while simultaneously creating high surface area Al2O3nanoparticles within the laser‐ablated regions. The intrinsic humidity‐responsive characteristics of the laser‐induced Al2O3nanostructures provide the wireless sensor with a tenfold higher sensitivity to humidity than a similar LC resonant sensor prepared by conventional photolithography‐based processes on FR‐4 substrates. The frequency change of the sensor is observed to be a linear function within the range of 0−85% RH, providing an average sensitivity of −87 kHz RH−1with good repeatability and stable performance. Furthermore, the employment of scalable laser fabrication processes using commercially available inexpensive materials renders these technologies viable for roll‐to‐roll manufacturing of low‐cost wireless sensors for smart packaging applications.
