Understanding the Effects of Low-Temperature Passivation and Annealing on ZnO TFTs Test Structures
- Award ID(s):
- 1653343
- PAR ID:
- 10098870
- Date Published:
- Journal Name:
- 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)
- Page Range / eLocation ID:
- 190 to 193
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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