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Title: Lithium niobate lateral overtone resonators for low power frequency-hopping applications
This work reports the first lithium niobate (LiNbO 3 ) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform k t 2 . The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO 3 resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO 3 LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.  more » « less
Award ID(s):
1824320
PAR ID:
10113051
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
2018 IEEE Micro Electro Mechanical Systems (MEMS)
Page Range / eLocation ID:
751 to 754
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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