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Title: Development of a manual multi-axes workpiece adjustment system for ultraprecision diamond machining
This paper describes the development and performance evaluation of a manual multi-axes workpiece adjustment system for ultra-precision diamond machining that is capable of holding a CaF2 specimen with high positioning accuracy without pre-machining. Experiments revealed that the specimen alignment system developed in this study has sub-micrometer adjustment resolution and demonstrates a stiffness that can withstand diamond cutting forces. Applying this system to diamond cutting of CaF2 produced an error of nominal cut thickness of at most 10 nm on both ends of the 10.5 mm cutting length and achieved a defect-free finished surface.  more » « less
Award ID(s):
1727244
PAR ID:
10115016
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Proc. 19th Int. Conference & Exhibition of the European Society for Precision Engineering & Nanotechnology
Volume:
3
Page Range / eLocation ID:
80-81
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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