Integrated photonics at near-IR (NIR) wavelengths currently lacks high bandwidth and low-voltage modulators, which add electro-optic functionality to passive circuits. Here, integrated hybrid thin-film lithium niobate (TFLN) electro-optic Mach–Zehnder modulators (MZM) are shown, using TFLN bonded to planarized silicon nitride waveguides. The design does not require TFLN etching or patterning. The push–pull MZM achieves a half-wave voltage length product (
- Award ID(s):
- 1741693
- PAR ID:
- 10131999
- Date Published:
- Journal Name:
- Nature photographer
- ISSN:
- 1049-6602
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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