Barmak, Katayun, Ezzat, Sameer, Gusley, Ryan, Jog, Atharv, Kerdsongpanya, Sit, Khaniya, Asim, Milosevic, Erik, Richardson, William, Sentosun, Kadir, Zangiabadi, Amirali, Gall, Daniel, Kaden, William E., Mucciolo, Eduardo R., Schelling, Patrick K., West, Alan C., and Coffey, Kevin R. Epitaxial metals for interconnects beyond Cu. Journal of Vacuum Science & Technology A 38.3 Web. doi:10.1116/6.0000018.

Barmak, Katayun, Ezzat, Sameer, Gusley, Ryan, Jog, Atharv, Kerdsongpanya, Sit, Khaniya, Asim, Milosevic, Erik, Richardson, William, Sentosun, Kadir, Zangiabadi, Amirali, Gall, Daniel, Kaden, William E., Mucciolo, Eduardo R., Schelling, Patrick K., West, Alan C., & Coffey, Kevin R. Epitaxial metals for interconnects beyond Cu. Journal of Vacuum Science & Technology A, 38 (3). https://doi.org/10.1116/6.0000018

Barmak, Katayun, Ezzat, Sameer, Gusley, Ryan, Jog, Atharv, Kerdsongpanya, Sit, Khaniya, Asim, Milosevic, Erik, Richardson, William, Sentosun, Kadir, Zangiabadi, Amirali, Gall, Daniel, Kaden, William E., Mucciolo, Eduardo R., Schelling, Patrick K., West, Alan C., and Coffey, Kevin R. "Epitaxial metals for interconnects beyond Cu". Journal of Vacuum Science & Technology A 38 (3). Country unknown/Code not available: American Vacuum Society. https://doi.org/10.1116/6.0000018. https://par.nsf.gov/biblio/10145186.

@article{osti_10145186,
place = {Country unknown/Code not available}, title = {Epitaxial metals for interconnects beyond Cu}, url = {https://par.nsf.gov/biblio/10145186}, DOI = {10.1116/6.0000018}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A}, volume = {38}, number = {3}, publisher = {American Vacuum Society}, author = {Barmak, Katayun and Ezzat, Sameer and Gusley, Ryan and Jog, Atharv and Kerdsongpanya, Sit and Khaniya, Asim and Milosevic, Erik and Richardson, William and Sentosun, Kadir and Zangiabadi, Amirali and Gall, Daniel and Kaden, William E. and Mucciolo, Eduardo R. and Schelling, Patrick K. and West, Alan C. and Coffey, Kevin R.}, }