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Title: Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing
Authors:
; ; ;
Award ID(s):
1929646
Publication Date:
NSF-PAR ID:
10185271
Journal Name:
Experimental Mechanics
Volume:
60
Issue:
3
Page Range or eLocation-ID:
329 to 343
ISSN:
0014-4851
Sponsoring Org:
National Science Foundation
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