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Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing
- Award ID(s):
- 1929646
- PAR ID:
- 10185271
- Date Published:
- Journal Name:
- Experimental Mechanics
- Volume:
- 60
- Issue:
- 3
- ISSN:
- 0014-4851
- Page Range / eLocation ID:
- 329 to 343
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1007/s11340-019-00565-5
