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Title: Electrical properties and interface abruptness of AlSiO gate dielectric grown on 000 1 ¯ N-polar and (0001) Ga-polar GaN
Award ID(s):
1839077
PAR ID:
10191610
Author(s) / Creator(s):
; ; ; ; ; ; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
115
Issue:
17
ISSN:
0003-6951
Page Range / eLocation ID:
172104
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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