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Title: Data Efficient Lithography Modeling With Transfer Learning and Active Data Selection
Award ID(s):
1718570
PAR ID:
10192080
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Volume:
38
Issue:
10
ISSN:
0278-0070
Page Range / eLocation ID:
1900 to 1913
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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