Frequency Stabilization in an Encapsulated High-Q Micromechanical Resonator via Internal Resonance
- Award ID(s):
- 1662464
- PAR ID:
- 10208238
- Date Published:
- Journal Name:
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Page Range / eLocation ID:
- 1191 to 1194
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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