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A methodology of 3D photolithography through light field projections with a microlens array (MLA) is proposed and demonstrated. With the MLA, light from a spatial light modulator (SLM) can be delivered to arbitrary positions, i.e., voxels, in a 3D space with a focusing scheme we developed. A mapping function between the voxel locations and the SLM pixel locations can be one-to-one determined by ray tracing. Based on a correct mapping function, computer-designed 3D virtual objects can be reconstructed in a 3D space through a SLM and a MLA. The projected 3D virtual object can then be optically compressed and delivered to a photoresist layer for 3D photolithography. With appropriate near-UV light, 3D microstructures can be constructed at different depths inside the photoresist layer. This 3D photolithography method can be useful in high-speed 3D patterning at arbitrary positions. We expect high-precision 3D patterning can also be achieved when a femtosecond light source and the associated multi-photon curing process is adopted in the proposed light field 3D projection/photolithography scheme. Multi-photon polymerization can prevent the unwilling patterning of regions along the optical path before arriving to the designed focal voxels as observed in our single photon demonstrations.
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A Venus-flytrap-based actuator
Conformable electrodes can be used to manipulate the electrical properties of a Venus flytrap, creating actuators that can be wirelessly controlled.
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- Award ID(s):
- 1655280
- PAR ID:
- 10213331
- Date Published:
- Journal Name:
- Nature electronics
- ISSN:
- 2520-1131
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Journal Article:
- The DOI is not currently available.
