- Editors:
- Bannister, Julie; Mohanty, Nihar
- Award ID(s):
- 1951245
- Publication Date:
- NSF-PAR ID:
- 10224478
- Journal Name:
- Proc. SPIE 11615, Advanced Etch Technology and Process Integration for Nanopatterning X
- Volume:
- 11615
- Sponsoring Org:
- National Science Foundation
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