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Title: Investigation of In Vacuo Atomic Layer Deposition of Ultrathin MgAl 2 O 4 Using Scanning Tunneling Spectroscopy
Award ID(s):
1909292 1809293 1508494
PAR ID:
10225205
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
ACS Applied Electronic Materials
Volume:
2
Issue:
10
ISSN:
2637-6113
Page Range / eLocation ID:
3121 to 3130
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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