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Title: First-principles studies of MoF6 absorption on hydroxylated and non-hydroxylated metal oxide surfaces and implications for atomic layer deposition of MoS2
Award ID(s):
1751268
NSF-PAR ID:
10274615
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Applied Surface Science
Volume:
541
Issue:
C
ISSN:
0169-4332
Page Range / eLocation ID:
148461
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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