Song, Seung Keun, Kim, Jung-Sik, Margavio, Hannah R., and Parsons, Gregory N. Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching. Retrieved from https://par.nsf.gov/biblio/10281827. ACS Nano 15.7 Web. doi:10.1021/acsnano.1c04086.

Song, Seung Keun, Kim, Jung-Sik, Margavio, Hannah R., & Parsons, Gregory N. Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching. ACS Nano, 15 (7). Retrieved from https://par.nsf.gov/biblio/10281827. https://doi.org/10.1021/acsnano.1c04086

Song, Seung Keun, Kim, Jung-Sik, Margavio, Hannah R., and Parsons, Gregory N. "Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching". ACS Nano 15 (7). Country unknown/Code not available. https://doi.org/10.1021/acsnano.1c04086. https://par.nsf.gov/biblio/10281827.

@article{osti_10281827,
place = {Country unknown/Code not available}, title = {Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching}, url = {https://par.nsf.gov/biblio/10281827}, DOI = {10.1021/acsnano.1c04086}, abstractNote = {}, journal = {ACS Nano}, volume = {15}, number = {7}, author = {Song, Seung Keun and Kim, Jung-Sik and Margavio, Hannah R. and Parsons, Gregory N.}, editor = {null} }