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Title: Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching
Award ID(s):
1704151
NSF-PAR ID:
10281827
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
ACS Nano
Volume:
15
Issue:
7
ISSN:
1936-0851
Page Range / eLocation ID:
12276 to 12285
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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