The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( at ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.
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Monolithic all-silicon flat lens for broadband LWIR imaging
We designed, fabricated, and characterized a flat multi-level diffractive lens comprised of only silicon with , focal , numerical aperture of 0.371, and operating over the long-wave infrared (LWIR) to 14 µm. We experimentally demonstrated a field of view of 46°, depth of focus , and wavelength-averaged Strehl ratio of 0.46. All of these metrics were comparable to those of a conventional refractive lens. The active device thickness is only 8 µm, and its weight (including the silicon substrate) is less than 0.2 g.
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- Award ID(s):
- 1936729
- PAR ID:
- 10287082
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Letters
- Volume:
- 46
- Issue:
- 16
- ISSN:
- 0146-9592; OPLEDP
- Format(s):
- Medium: X Size: Article No. 4069
- Size(s):
- Article No. 4069
- Sponsoring Org:
- National Science Foundation
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