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Title: Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index (n=3.1atλ<#comment/>=1550nm) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of65×<#comment/>65µ<#comment/>m2, having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of8mW/π<#comment/>and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.

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Award ID(s):
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optics Letters
0146-9592; OPLEDP
Page Range / eLocation ID:
Article No. 4646
Medium: X
Sponsoring Org:
National Science Foundation
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