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Title: Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( n = 3.1 at λ<#comment/> = 1550 n m ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of 65 ×<#comment/> 65 µ<#comment/> m 2 , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of 8 m W / π<#comment/> and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.  more » « less
Award ID(s):
2023730
PAR ID:
10304727
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optics Letters
Volume:
46
Issue:
18
ISSN:
0146-9592; OPLEDP
Format(s):
Medium: X Size: Article No. 4646
Size(s):
Article No. 4646
Sponsoring Org:
National Science Foundation
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