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Title: Excimer laser liftoff of AlGaN/GaN HEMTs on thick AlN heat spreaders
Award ID(s):
1711322 1810116
NSF-PAR ID:
10312820
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
119
Issue:
13
ISSN:
0003-6951
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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