From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films
- Award ID(s):
- 1853254
- PAR ID:
- 10319359
- Date Published:
- Journal Name:
- Surface and Coatings Technology
- Volume:
- 432
- Issue:
- C
- ISSN:
- 0257-8972
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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