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Title: Synthesis of High Etch Contrast Poly(3-hydroxystyrene)-Based Triblock Copolymers and Self-Assembly of Sub-5 nm Features
Award ID(s):
2003891 1720415
NSF-PAR ID:
10332645
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Macromolecules
Volume:
54
Issue:
20
ISSN:
1539-8870
Page Range / eLocation ID:
9542
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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