Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive
- Award ID(s):
- 2103091
- NSF-PAR ID:
- 10337001
- Date Published:
- Journal Name:
- Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)
- Page Range / eLocation ID:
- 979 to 982
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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