Yousuf, S M, Liu, Yuncong, Zheng, Xu-Qian, Qamar, Afzaal, Rais-Zadeh, Mina, and Feng, Philip X.-L. Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive. Retrieved from https://par.nsf.gov/biblio/10337001. Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022) . Web. doi:10.1109/MEMS51670.2022.9699607.

Yousuf, S M, Liu, Yuncong, Zheng, Xu-Qian, Qamar, Afzaal, Rais-Zadeh, Mina, & Feng, Philip X.-L. Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive. Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), (). Retrieved from https://par.nsf.gov/biblio/10337001. https://doi.org/10.1109/MEMS51670.2022.9699607

Yousuf, S M, Liu, Yuncong, Zheng, Xu-Qian, Qamar, Afzaal, Rais-Zadeh, Mina, and Feng, Philip X.-L. "Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive". Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022) (). Country unknown/Code not available. https://doi.org/10.1109/MEMS51670.2022.9699607. https://par.nsf.gov/biblio/10337001.

@article{osti_10337001,
place = {Country unknown/Code not available}, title = {Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive}, url = {https://par.nsf.gov/biblio/10337001}, DOI = {10.1109/MEMS51670.2022.9699607}, abstractNote = {}, journal = {Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)}, author = {Yousuf, S M and Liu, Yuncong and Zheng, Xu-Qian and Qamar, Afzaal and Rais-Zadeh, Mina and Feng, Philip X.-L.}, }