skip to main content


Title: Retaining High Q Factors in Electrode-Less Aln-On-Si Bulk Mode Resonators with Non-Contact Electrical Drive
Award ID(s):
2103091
NSF-PAR ID:
10337001
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Proc. of the 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)
Page Range / eLocation ID:
979 to 982
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found