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Title: Large Scale Deterministic Creation of Single Photon Emitters in Silicon Nitride Nanopillars
We demonstrated large scale deterministic creation of single photon emitters in annealed silicon nitride on silicon oxide pillars. The estimated single photon emitter yield is approximately 50% with a lateral accuracy of ±85nm.  more » « less
Award ID(s):
2015025
PAR ID:
10348795
Author(s) / Creator(s):
; ; ; ; ; ; ;
Date Published:
Journal Name:
Large Scale Deterministic Creation of Single Photon Emitters in Silicon Nitride Nanopillars
Page Range / eLocation ID:
FS4B.5
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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