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Title: A perspective on β -Ga 2 O 3 micro/nanoelectromechanical systems
Award ID(s):
2019753 1810041
NSF-PAR ID:
10362212
Author(s) / Creator(s):
 ;  ;  
Publisher / Repository:
American Institute of Physics
Date Published:
Journal Name:
Applied Physics Letters
Volume:
120
Issue:
4
ISSN:
0003-6951
Page Range / eLocation ID:
Article No. 040502
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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