A perspective on β -Ga 2 O 3 micro/nanoelectromechanical systems
- NSF-PAR ID:
- 10362212
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 120
- Issue:
- 4
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- Article No. 040502
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation