We report on scalable heterointegration of superconducting electrodes and epitaxial semiconductor quantum dots (QDs) on strong piezoelectric and optically nonlinear lithium niobate. The implemented processes combine the sputter-deposited thin film superconductor niobium nitride and III–V compound semiconductor membranes onto the host substrate. The superconducting thin film is employed as a zero-resistivity electrode material for a surface acoustic wave resonator with internal quality factors
Near-infrared electroluminescence of InGaN quantum dots (QDs) formed by controlled growth on photoelectrochemical (PEC) etched QD templates is demonstrated. The QD template consists of PEC InGaN QDs with high density and controlled sizes, an AlGaN capping layer to protect the QDs, and a GaN barrier layer to planarize the surface. Scanning transmission electron microscopy (STEM) of Stranski–Krastanov (SK) growth on the QD template shows high-In-content InGaN QDs that align vertically to the PEC QDs due to localized strain. A high-Al-content
- Award ID(s):
- 2204317
- NSF-PAR ID:
- 10369321
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Photonics Research
- Volume:
- 10
- Issue:
- 1
- ISSN:
- 2327-9125
- Page Range / eLocation ID:
- Article No. 33
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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