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Title: Micromachined water-immersible scanning mirror with torsional and bending hinges
Award ID(s):
2036134
PAR ID:
10392080
Author(s) / Creator(s):
; ;
Editor(s):
Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans
Date Published:
Journal Name:
Proceedings of SPIE
Volume:
12013
Page Range / eLocation ID:
17
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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