LSTM-Based Model Predictive Control of Piezoelectric Motion Stages for High-Speed Autofocus
- Award ID(s):
- 1942185
- PAR ID:
- 10396621
- Date Published:
- Journal Name:
- IEEE Transactions on Industrial Electronics
- Volume:
- 70
- Issue:
- 6
- ISSN:
- 0278-0046
- Page Range / eLocation ID:
- 6209 to 6218
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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