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Abstract Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.
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Ultrathin Broadband Metasurface Superabsorbers from a van der Waals Semimetal
Abstract Metamaterials and metasurfaces operating in the visible and near‐infrared (NIR) offer a promising route towards next‐generation photodetectors and devices for solar energy harvesting. While numerous metamaterials and metasurfaces using metals and semiconductors have been demonstrated, semimetals‐based metasurfaces in the vis‐NIR range are notably missing. This work experimentally demonstrates a broadband metasurface superabsorber based on large area, semimetallic, van der Waals platinum diselenide (PtSe2) thin films in agreement with electromagnetic simulations. The results show that PtSe2is an ultrathin and scalable semimetal that concurrently possesses high index and high extinction across the vis‐NIR range. Consequently, the thin‐film PtSe2on a reflector separated by a dielectric spacer can absorb >85% for the unpatterned case and ≈97% for the optimized 2D metasurface in the 400–900 nm range making it one of the strongest and thinnest broadband perfect absorbers to date. The results present a scalable approach to photodetection and solar energy harvesting, demonstrating the practical utility of high index, high extinction semimetals for nanoscale optics.
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- Award ID(s):
- 1720530
- PAR ID:
- 10398226
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Optical Materials
- Volume:
- 11
- Issue:
- 4
- ISSN:
- 2195-1071
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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