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Title: Engineering thermal transport within Si thin films: The impact of nanoslot alignment and ion implantation
Authors:
; ; ;
Award ID(s):
1651840
Publication Date:
NSF-PAR ID:
10399615
Journal Name:
iScience
Volume:
25
Issue:
11
Page Range or eLocation-ID:
105386
ISSN:
2589-0042
Sponsoring Org:
National Science Foundation
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