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Title: Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling
Award ID(s):
2006422 1602491
NSF-PAR ID:
10405495
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Surface and Coatings Technology
Volume:
447
Issue:
C
ISSN:
0257-8972
Page Range / eLocation ID:
128880
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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