Integrated electro-optic (EO) modulators are fundamental photonics components with utility in domains ranging from digital communications to quantum information processing. At telecommunication wavelengths, thin-film lithium niobate modulators exhibit state-of-the-art performance in voltage-length product (
Integrated photonics at near-IR (NIR) wavelengths currently lacks high bandwidth and low-voltage modulators, which add electro-optic functionality to passive circuits. Here, integrated hybrid thin-film lithium niobate (TFLN) electro-optic Mach–Zehnder modulators (MZM) are shown, using TFLN bonded to planarized silicon nitride waveguides. The design does not require TFLN etching or patterning. The push–pull MZM achieves a half-wave voltage length product (
- NSF-PAR ID:
- 10410779
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optica
- Volume:
- 10
- Issue:
- 5
- ISSN:
- 2334-2536
- Page Range / eLocation ID:
- Article No. 578
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Abstract V π L ), optical loss, and EO bandwidth. However, applications in optical imaging, optogenetics, and quantum science generally require devices operating in the visible-to-near-infrared (VNIR) wavelength range. Here, we realize VNIR amplitude and phase modulators featuringV π L ’s of sub-1 V ⋅ cm, low optical loss, and high bandwidth EO response. Our Mach-Zehnder modulators exhibit aV π L as low as 0.55 V ⋅ cm at 738 nm, on-chip optical loss of ~0.7 dB/cm, and EO bandwidths in excess of 35 GHz. Furthermore, we highlight the opportunities these high-performance modulators offer by demonstrating integrated EO frequency combs operating at VNIR wavelengths, with over 50 lines and tunable spacing, and frequency shifting of pulsed light beyond its intrinsic bandwidth (up to 7x Fourier limit) by an EO shearing method. -
Thin-film lithium niobate (TFLN) is a promising electro-optic (EO) photonics platform with high modulation bandwidth, low drive voltage, and low optical loss. However, EO modulation in TFLN is known to relax on long timescales. Instead, thermo-optic heaters are often used for stable biasing, but heaters incur challenges with cross-talk, high power, and low bandwidth. Here, we characterize the low-frequency (1 mHz to 1 MHz) EO response of TFLN modulators, investigate the root cause of EO relaxation and demonstrate methods to improve bias stability. We show that relaxation-related effects can enhance EO modulation across a frequency band spanning 1kHz to 20kHz in our devices – a counter-intuitive result that can confound measurement of half-wave voltage (
V π ) in TFLN modulators. We also show that EO relaxation can be slowed by more than 104-fold through control of the LN-metal interface and annealing, offering progress toward lifetime-stable EO biasing. Such robust EO biasing would enable applications for TFLN devices where cross-talk, power, and bias bandwidth are critical, such as quantum devices, high-density integrated photonics, and communications. -
High‐speed modulators with low driving voltage, low loss, and compact size are essential for future optical communication systems. Thin‐film lithium niobate modulators have met each of these criteria separately, but simultaneous achievement of all of them has been challenging on this platform. Low driving voltage electro‐optic modulators necessitate either a narrow gap between the electrodes or an elongated Mach–Zehnder arms, both of which adversely affect the microwave loss, hence the bandwidth. Herein, this trade‐off is alleviated by placing the optical waveguides nonsymmetrically with respect to the electrodes and by including a dielectric buffer layer beneath the electrodes. Exploiting this novel design yields a modulator with a measured roll‐off of only 2 dB from low frequencies up to 100 GHz, and with an extrapolated 3 dB bandwidth of 170 GHz. The measured voltage–length product of this subterahertz device is 3.3 V cm. Another device, optimized for a lower voltage–length product of 2.2 V cm, exhibits a 3 dB electro‐optic bandwidth of 84 GHz. The devices are also tested for eight‐level pulse‐amplitude modulation (PAM‐8) and demonstrate data rates of up to 240 Gb s−1at 80 Gbaud, validating that the modulators are a propitious candidate for next‐generation optical communication systems.
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