We report on the free charge carrier properties of a two-dimensional electron gas (2DEG) in an AlN/Al x Ga 1– x N high electron mobility transistor structure with a high aluminum content ( x = 0.78). The 2DEG sheet density [Formula: see text] cm −2 , sheet mobility [Formula: see text] cm 2 /(Vs), sheet resistance [Formula: see text] [Formula: see text], and effective mass [Formula: see text] at low temperatures [Formula: see text] are determined by terahertz (THz) optical Hall effect measurements. The experimental 2DEG mobility in the channel is found within the expected range, and the sheet carrier density is in good agreement with self-consistent Poisson–Schrödinger calculations. However, a significant increase in the effective mass of 2DEG electrons at low temperatures is found in comparison with the respective value in bulk Al 0.78 Ga 22 N ([Formula: see text]). Possible mechanisms for the enhanced 2DEG effective mass parameter are discussed and quantified using self-consistent Poisson–Schrödinger calculations.
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Controlled Si doping of β -Ga 2 O 3 by molecular beam epitaxy
We report controlled silicon doping of Ga 2 O 3 grown in plasma-assisted molecular beam epitaxy. Adding an endplate to the Si effusion cell enables the control of the mobile carrier density, leading to over 5-orders of magnitude change in the electrical resistivity. Room temperature mobilities [Formula: see text] are achieved, with a peak value [Formula: see text] at a doping density of low-[Formula: see text]. Temperature-dependent Hall effect measurements exhibit carrier freeze out for samples doped below the Mott criterion. A mobility of [Formula: see text] is observed at [Formula: see text].
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- Award ID(s):
- 1719875
- PAR ID:
- 10411497
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 121
- Issue:
- 7
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- 072108
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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