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Title: High-Performance Chain Scissionable Resists for Extreme Ultraviolet Lithography: Discovery of the Photoacid Generator Structure and Mechanism
Award ID(s):
1719875
NSF-PAR ID:
10411553
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Chemistry of Materials
Volume:
34
Issue:
13
ISSN:
0897-4756
Page Range / eLocation ID:
6170 to 6181
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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